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Principle and application of ball surface acoustic wave (SAW) sensor

机译:球面声波传感器的原理与应用

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References(17) Cited-By(8) Detection of hydrogen gas is a crucial task for establishing safety and reliability of fuel cells, a key technology for the environment and our society. However, hydrogen is difficult to detect and various hydrogen sensors have many drawbacks. Here we report a novel hydrogen gas sensor, the ball surface acoustic wave (SAW) sensor, using Pd or PdNi sensitive film. The ball SAW sensor is based on a novel phenomenon, diffraction-free propagation of collimated beam along an equator of sphere. The resultant ultra-multiple roundtrips of SAW makes it possible to achieve highest sensitivity among SAW sensors. Moreover, it enables to use a very thin sensitive film, and consequently the shortest response time (2 s) was realized. In terms of the sensing range, it has the widest range of 10 ppm to 100% among any hydrogen sensors including FET or resistivity sensors. The response time was less than 1 s for 3.0% hydrogen concentration in nitrogen gas, evaluated by using a newly developed digital quadrature detector.
机译:参考文献(17)引用(8)氢气的检测是建立燃料电池安全性和可靠性的关键任务,这是环境和社会的关键技术。然而,氢难以检测并且各种氢传感器具有许多缺点。在这里,我们报告了一种新颖的氢气传感器,即使用Pd或PdNi敏感膜的球表面声波(SAW)传感器。球形声表面波传感器基于一种新颖的现象,即准直光束沿球面赤道的无衍射传播。由此产生的SAW的超多次往返可以实现SAW传感器中最高的灵敏度。此外,它可以使用非常薄的感光膜,因此实现了最短的响应时间(2 s)。就感测范围而言,在包括FET或电阻率传感器在内的任何氢传感器中,它的最宽范围为10 ppm至100%。通过使用新开发的数字正交检测器评估,氮气中氢气浓度为3.0%时,响应时间少于1 s。

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