The Research of Induced Current in Coils When the Process of Motion of Magnetically Levitated Planar Actuators

摘要

In the process of motion magnetically levitated planar actuators, the magnetic flux through thecoils been changed as the position changed, It produced inductive electromotive force whichassociated with the location and speed of coils. Induction electromotive force to produceinduced current in the coils, which influence the stability of the actuators. This paper presents aanalytical model of induction electromotive force in the coils of magnetically levitated a planaractuators, According to the analytical model it could predict control the compensation of drivecurrents in order to offset the induced current which produce by electromotive force, thestability of Magnetically levitated planar actuators have been improved. Finite elementsimulation had been used in this paper to approve the correct of the analytical model.