Development of Anode Slime Free-System for Copper Plating Using Acid Copper Sulfate Bath

摘要

The behavior of Cu~+ ions produced in the course of copper anode dissolution in an acid copper sulfate solution was investigated electrochemically using a rotating Pt disc electrode system. The Cu~+ ion concentration of the solution was proven to be related to the natural potentials, Er, of the Pt electrode. The amount of Cu~+ ions produced by a phosphorous deoxidized copper anode was found to be much smaller than that from an electrolytic copper anode as noted by monitoring the Er of Pt electrode dipped in the solution.