Design and simulation of electro-thermal compliant MEMS logic gates

摘要

PurposeThe purpose of this paper is to design an out-of-plane micro electro-thermal-compliant actuator based logic gates which work analogously to complementary metal oxide semiconductor (CMOS) based logic gates. The proposed logic gates used a single-bit mechanical micro ETC actuator per logic instead of using 6-14 individual transistors as in CMOS.