Fine Lines in High Yield (Part CXXII): Control of the Photoresist Stripping Process

摘要

A discussion about the control of the stripping process needs to take into account which process perform- ance criteria have to be considered. Stripping per- m formance criteria include strip speed and cleanliness (or completeness) of stripping, resist loading capability, minimal metal attack (tarnish), ability to "tailor" the stripper skin size for filter compatibility, and cost and ease of disposal.