Rapidly Calculation Method of Radiative Heat Transfer Analysis by Reducing Element Number and Application of Lamp Heaters

摘要

It is important to shorten the computation time of radiative heat transfer when doing a conjugate numerical heat transfer analysis. The relation between the computation time and the total number of surface elements is shown for an analysis of radiative heat transfer. A method that shorten the computation time by reducing element number has been developed. The method merges elements of low radiative heat flux using the results of a rough calculation. It seems promising for reducing the computation time without increasing errors. The distribution of radiative heat flux on a wafer in a lamp heating apparatus was calculated using the method. The results show that the distribution of the heat flux can be reduced by using a diffusive reflector.