A rapid calculation method for radiative heat transfer analysis and its application to lamp heaters

摘要

It is important to shorten the computation time of radiative heat transfer when doing a conjugate numerical heat transfer analysis. A method that shortens the computation time by reducing number of elements in radiation analysis without increasing errors has been developed. The method merges elements of low radiative heat flux by using the roughly calculated that flux. The distributions of radiative heat flux on a wafer in a lamp heating appararatus with specular or diffuse reflectors ware calculated by using the developed method, whose computation time is 1/4 of that of a conventional method. This application of the method shows that the variation of the heat flux on the wafer can be reduced to half by using diffuse reflectors.