Two-Side Electron Beam Pumping System For Hundred-Joule-Level KrF Excimer Laser

摘要

The pulsed power system for the "Heaven-1" hundred-joule-level KrF excimer laser is described. The design of the pulse forming line, bifurcated pulse transmission lines and large-area diodes is summarized and the experimental results are presented. The diodes can steadily operate at 650 kV and the behavior of diode impedance is studied at the diode voltage ranging from 400 to 650 kV. The energy transmission efficiency from the Marx generator to the diodes reaches 75%, and the total electron beam energy arrives at ～22 kJ for the 1300 kV Marx generator voltage. A hundred-joul-level KrF excimer laser is pumped from two sides by the electron beams provided by this pulsed power system.