Femtosecond laser direct writing in transparent materials based on nonlinear absorption

摘要

Femtosecond laser direct writing (FsLDW) in transparent materials is a laser-based precise three-dimensional (3D) microanofabrication method that has shown great potential for applications. The advantages of FsLDW originate in the nonlinear nature of absorption in the multiphoton absorption process. Over the past few years, transparent material microanofabrication using FsLDW has seen several developments in materials and applications. Specifi cally, two-photon polymerization has been widely used as a precision direct-writing process for fabrication of polymeric 3D microanostructures; internal/surface ablation of polymer 3D structures based on multiphoton absorption has been demonstrated and developed as a promising subtractive manufacturing technique; and femtosecond laser multiphoton modification in glass has been intensively studied for refractive-index change and generation of nanogratings and microvoids. This article describes the latest research on FsLDW in polymers and glasses with specific applications for large-dimension fabrication, microelectromechanical systems, microphotonics, and microfluidics.