首页> 外国专利> DIRECT WRITING OF OPTICAL DEVICES IN SILICA-BASED GLASS USING FEMTOSECOND PULSE LASERS

DIRECT WRITING OF OPTICAL DEVICES IN SILICA-BASED GLASS USING FEMTOSECOND PULSE LASERS

机译:利用毫微秒脉冲激光直接写入二氧化硅基玻璃中的光学器件

摘要

The invention relates to methods of writing a light guiding structure in a bulk glass substrate. The bulk glass substrate is preferably made from a soft silica-based material having an annealing point less than about 1380 DEG K. Pulsed laser beam is focused within the substrate while the focus is translated relative to the substrate along a scan path at a scan speed effective to induce an increase in the refractive index of the material along the scan path. Substantially no laser induced physical damage of the material is incurred along the scan path. Various optical devices can be made using this method.
机译:本发明涉及在块状玻璃基板中写入光导结构的方法。块状玻璃基板最好由退火点小于约1380°K的软质二氧化硅基材料制成。脉冲激光束聚焦在基板内,同时焦点以扫描速度沿扫描路径相对于基板平移。有效地引起沿着扫描路径的材料的折射率增加。沿扫描路径基本上不会引起材料的激光诱导的物理损坏。使用这种方法可以制造各种光学器件。

著录项

  • 公开/公告号EP1204977A4

    专利类型

  • 公开/公告日2003-08-13

    原文格式PDF

  • 申请/专利权人 CORNING INCORPORATED;

    申请/专利号EP20000950775

  • 发明设计人 SMITH CHARLENE M.;BORRELLI NICHOLAS F.;

    申请日2000-07-28

  • 分类号G11C13/04;

  • 国家 EP

  • 入库时间 2022-08-21 23:51:34

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