layering processes and their applications in silicon microelectronics

摘要

historically, both the cost reduction and the performance improvement of silicon microelectronic devices are unparalleled. In addition, the pervasiveness of sillcion- based integrated circuits (Ics) in electronic systems continues as the industry moves into the gigachip age with giga-scale integration (GSI). Metal-oxide silicon field-effect transistors (MOSFETs) are used in circuits ranging from memories to microprocessors to custom logic circuits for such functions as echo cancellation, voice recognition, data encryption, and high-definition television.