机译:从启动到关闭的双刀片多集群工具全过程的最佳集成时间表
School of Computer Science and Technology Guangdong University of Technology Guangzhou 510006 China and also with the Helen and John C. Hartmann Department of Electrical and Computer Engineering New Jersey Institute of Technology Newark NJ 07102 USA;
Institute of Systems Engineering Macau University of Science and Technology Taipa Macau China;
Institute of Systems Engineering Macau University of Science and Technology Taipa Macau China and also with the National Key Laboratory of Precise Electronic Manufacturing Technology and Equipment Guangdong University of Technology Guangzhou 510006 China;
Tools; Optimal scheduling; Robots; Steady-state; Transient analysis; Schedules; Job shop scheduling;
机译:从启动到关闭的双刀片多集群工具整个过程的最佳集成时间表
机译:从启动到关闭的双刀片多集群工具整个过程的最佳集成时间表
机译:利用晶圆延迟调节来调度双臂集群工具的启动和关闭时间
机译:晶圆停留时间受限制的多群集工具的关闭工艺调度
机译:动态仿真,这是在工厂启动和过程失常期间将CPI的耀斑最小化的强大工具。
机译:具有可控处理时间的集成项目计划和人员分配
机译:用于改善调度性能的多集群工具的Petri网权管理设计
机译:OsCaR上的实时动态系统仿真并行处理(Optimal sceduled advanced multiprocessoR)