机译:从启动到关闭的双刀片多集群工具整个过程的最佳集成时间表
[1]IEEE;
[2]the School of Computer Science and Technology,Guangdong University of Technology,Guangzhou 510006,China,and also with the Helen and John C.Hartmann Department of Electrical and Computer Engineering,New Jersey Institute of Technology,Newark NJ 07102,USA;
[1]IEEE;
[3]the Institute of Systems Engineering,Macau University of Science and Technology,Taipa,Macau,China;
[1]IEEE;
[4]the Institute of Systems Engineering,Macau University of Science and Technology,Taipa,Macau,China,and also with the National Key Laboratory of Precise Electronic Manufacturing Technology and Equipment,Guangdong University of Technology,Guangzhou 510006,China;
Multi-cluster tools; robots; scheduling transient periods; semiconductor manufacturing systems;