Aerosol-Assisted Chemical Vapor Deposition of Thin Films of Cadmium Sulfide and Zinc Sulfide Prepared from Bis(dibutyldithiocarbamato)Metal Complexes

摘要

Bis(dibutyldithiocarbamato)metal complexes of cadmium and zinc were synthesized as precursors for growth of thin films of cadmium sulfide (CdS) and zinc sulfide (ZnS) by aerosol-assisted chemical vapor deposition on glass substrates. The decomposition of the precursor complexes was observed by thermogravi-metric analysis, and it took place at 350-450℃ with toluene used as the solvent. The CdS and ZnS films were analyzed by X-ray powder diffraction, scanning electron microscopy and energy-dispersive X-ray analysis. The preferred orientation of the crystallites within the films changed with respect to the deposition temperature. The scanning electron microscopy and energy-dispersive X-ray analysis results showed the uniform distribution of CdS and ZnS in the films, which makes them useful photoconducting materials on a structured surface.