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首页> 外文期刊>Applied Surface Science >Reduction of leakage current in amorphous Oxide-Semiconductor Top-gated thin film transistors by interface engineering with dipolar Self-Assembled monolayers
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Reduction of leakage current in amorphous Oxide-Semiconductor Top-gated thin film transistors by interface engineering with dipolar Self-Assembled monolayers

机译:通过与双极自组装单层的界面工程通过界面工程减少非晶氧化物半导体顶齿薄膜晶体管的漏电流

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摘要

Top gate (TG) thin film transistors (TFTs) featuring amorphous metal oxide semiconductors (a-MOS), such as indium-gallium-zinc-oxide (IGZO), bear a great potential for large-area flexible and transparent electronics. The fabrication costs of these devices can be noticeably reduced by introduction of solution processes instead of standard fabrication routes involving vacuum deposition and complicate photolithography. However, solution processed TG a-MOS TFT often causes considerable gate leakage in comparison with vacuum-processed device. In this context, we present a simple and straightforward approach to reduce the gate leakage of IGZO-based TG TFTs, which predominantly involves solution-based procedures. We engineer the IGZO/insulator interface by dipolar, silane-anchored self-assembled monolayers (SAMs) providing a favorable built-in electric field to reduce the leakage current in TFTs. The parameter correlates well with the direction and value of the molecular dipole moment defined by either electron accepting or electron donating character of the terminal tail group. These SAMs, prepared by spin-coating procedure, were characterized in detail by a combination of several complementary experimental techniques, providing also a useful background information for the device experiments.
机译:顶部门(Tg)薄膜晶体管(TFT)具有非晶金属氧化物半导体(A-MOS),例如镓 - 氧化锌(IGZO),具有大面积柔性且透明电子产品的巨大潜力。通过引入溶液过程而不是涉及真空沉积和复杂光刻复杂化的标准制造路线,可以显着降低这些装置的制造成本。然而,与真空处理装置相比,溶液处理的Tg A-MOS TFT经常导致相当大的栅极泄漏。在这种情况下,我们提出了一种简单而直接的方法来减少基于IGZO的TG TFT的栅极泄漏,这主要涉及基于解决方案的程序。我们通过双极,硅烷锚定的自组装单层(SAMS)来设计IGZO /绝缘体界面,提供有利的内置电场,以减少TFT中的漏电流。该参数良好地与由端子尾部的电子接受或电子捐赠特征定义的分子偶极力矩的方向和值相关。通过自旋涂覆程序制备的这些SAM通过几种互补实验技术的组合详细描述,为器件实验提供了一个有用的背景信息。

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