BEOL-compatible synthesis of multi-layer graphene by carbon ion implantation on cobalt thin films

Kim Janghyuk; Kim Hong-Yeol; Lee Dongryul; An Sungjoo; Kim Jihyun

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BEOL-compatible synthesis of multi-layer graphene by carbon ion implantation on cobalt thin films

机译：钴薄膜上碳离子注入的BEOL - 兼容合成多层石墨烯

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《Applied Surface Science》 |2020年第15期|146537.1-146537.6|共6页
作者
Kim Janghyuk; Kim Hong-Yeol; Lee Dongryul; An Sungjoo; Kim Jihyun;
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Korea Univ Dept Chem & Biol Engn Seoul 02841 South Korea;

Korea Univ Dept Chem & Biol Engn Seoul 02841 South Korea;

Korea Univ Dept Chem & Biol Engn Seoul 02841 South Korea;

Samsung Elect Semicond R&D Ctr Proc Dev Team Hwaseong 18382 South Korea;

Korea Univ Dept Chem & Biol Engn Seoul 02841 South Korea;

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1. Multi-layer graphene obtained by high temperature carbon implantation into nickel films [J] . G. Gutierrez, F. Le Normand, D. Muller Carbon: An International Journal Sponsored by the American Carbon Society . 2014,第Null期

机译：通过高温碳注入镍膜获得的多层石墨烯
2. Synthesis of few-layered graphene by ion implantation of carbon in nickel thin films [J] . Baraton L., He Z., Lee C.S., Nanotechnology . 2011,第8期

机译：碳离子注入镍薄膜中合成几层石墨烯
3. Control of stress and delamination in single and multi-layer carbon thin films prepared by cathodic arc and RF plasma deposition and implantation [J] . Ha PCT, McKenzie DR, Bilek MMM, Surface & Coatings Technology . 2006,第22a23期

机译：通过阴极电弧和RF等离子体沉积和注入制备的单层和多层碳薄膜中的应力和分层的控制
4. Multi-layer carbon nitride thin films prepared by repeated process of carbon sputter-deposition and nitrogen ion implantation [C] . Fujiyama H., Shibata T., Morita N., Electromagnetic Compatibility Symposium Record, 1968 IEEE . -1

机译：通过碳溅射沉积和氮离子注入的重复过程制备的多层氮化碳薄膜
5. Complex pattern formation in carbon thin films and multi-layer graphene through low temperature etching by catalytic combustion. [D] . Bulut, Lutfiye. 2010

机译：通过催化燃烧的低温蚀刻在碳薄膜和多层石墨烯中形成复杂的图案。
6. A preparation approach of exploring cluster ion implantation: from ultra-thin carbon film to graphene [O] . Zesong Wang, Zaodi Zhang, Rui Zhang, 2014

机译：探索团簇离子注入的一种制备方法：从超薄碳膜到石墨烯
7. Synthesis of few-layered graphene by ion implantation of carbon in nickel thin films [O] . Baraton Laurent, He Zhanbing, Lee Chang Seok, 2011

机译：碳离子注入镍薄膜中合成几层石墨烯

BEOL-compatible synthesis of multi-layer graphene by carbon ion implantation on cobalt thin films

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