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机译:氮等离子体和氧等离子体在提高4H-SiC MOS电容器界面质量和偏置温度不稳定性的协同钝化效应
Dalian Univ Technol Fac Elect Informat & Elect Engn Sch Control Sci & Engn Minist Educ Key Lab Intelligent Control & Optimizat Ind Equip Dalian 116024 Peoples R China;
Dalian Univ Technol Fac Elect Informat & Elect Engn Sch Control Sci & Engn Minist Educ Key Lab Intelligent Control & Optimizat Ind Equip Dalian 116024 Peoples R China;
Dalian Univ Technol Fac Elect Informat & Elect Engn Sch Control Sci & Engn Minist Educ Key Lab Intelligent Control & Optimizat Ind Equip Dalian 116024 Peoples R China;
Dalian Univ Technol Minist Educ State Key Lab Mat Modificat Laser Ion & Electron Dalian 116024 Peoples R China;
Dalian Univ Technol Minist Educ State Key Lab Mat Modificat Laser Ion & Electron Dalian 116024 Peoples R China;
Dalian Univ Technol Fac Elect Informat & Elect Engn Sch Control Sci & Engn Minist Educ Key Lab Intelligent Control & Optimizat Ind Equip Dalian 116024 Peoples R China;
4H-SiC; MOS capacitor; Density of interface traps; Bias temperature instability; Synergistic effects; Post-oxidation annealing;
机译:4H-SiC MOS电容器中三元H-Cl-N混合等离子体后氧化退火的界面特性和偏置温度不稳定性
机译:具有三元H-CL-N混合等离子体在4H-SIC MOS电容器中的换渗透退火的界面性能和偏置温度不稳定性
机译:氮等离子体钝化对锗MOS电容器界面的影响
机译:后氧等离子体处理对低衬底温度下Pt /(Ba,Sr)TiO / sub 3 // Pt电容器的影响
机译:聚变和太阳等离子体:中子和等离子体对聚变反应堆中材料的协同作用以及聚变和太阳等离子体中融合的磁通量线的松弛
机译:血浆中活化的液体介质中活性氧和活性氮的协同作用触发星形胶质细胞伤口愈合
机译:氮素谱和浓度对原位氮化制备的血浆增强原子层沉积HFOXNY对等离子体增强原子层沉积HFOXNY的影响