Composition characterization of combinatorial materials by scanning X-ray fluorescence microscopy using microfocused synchrotron X-ray beam

摘要

We describe a high-throughput scanning X-ray fluorescence (XRF) microscopy setup using a microfocused synchrotron X-ray beam, which is optimized for in-parallel X-ray characterization of composition and crystalline structure of combinatorial samples. We present X-ray fluorescence elemental maps of a full ternary Co_xMn_yGe_(1-x-y) composition-spread thin film and discuss the quantitative analysis method used for obtaining the ternary composition.