Design and development of an ultra-compact drum-shaped chamber for combinatorial pulsed laser deposition

摘要

We have designed a compact combinatorial pulsed laser deposition (PLD) chamber as a building block of a desktop laboratory for advanced materials research. Development of small-size systems for the growth and characterization of films would greatly help in interconnecting a variety of analytical tools for rapid screening of advanced materials. This PLD chamber has four special features: (1) a drum-shaped growth chamber, (2) a waterwheel-like combinatorial masking system, (3) a multi-target system having one feedthrough, and (4) a small reflection high-energy electron diffraction (RHEED) system. The performance of this system is demonstrated by the RHEED intensity oscillation during homoepitaxial growth of SrTiO_3 as well as by simultaneous fabrication of a ternary phase diagram of rare earth-doped Y_2O_3 phosphors.