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Control parameters in pattern formation upon femtosecond laser ablation

机译:飞秒激光烧蚀时图案形成中的控制参数

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Femtosecond laser ablation experiments on different materials have revealed a great diversity of self-organized nano-structures on the bottom of the ablated area. They range from arrays of nano-spheres to bifurcating longer lines, with size and shape depending on the irradiation dose and number of laser pulses. In this contribution, laser beam polarization and surface charge distribution, following surface relaxation, are investigated as control parameters for this nano-structures formation. Experiments with linear, circular and, for the first time, elliptical polarized light indicate that the laser polarization has a great influence on the orientation of the ripples. Investigations with laser beams of elliptical polarization show that, whereas the ripples orientation is defined by the major axis of the polarization ellipse, the ripple morphology is sensitive to the ellipticity. For silicon samples electrical measurements with a scanning-probe microscope on the ablated area reveal a spatial variation of the surface potential, possibly generated by a local change in dopant density, correlated with the patterns' modulation on the crater bottom.
机译:飞秒激光在不同材料上的烧蚀实验表明,烧蚀区域底部的自组织纳米结构非常多样。它们的范围从纳米球阵列到分叉较长的线,其大小和形状取决于辐照剂量和激光脉冲数。在此贡献中,研究了激光束的偏振和表面电荷分布,以及表面弛豫后,作为该纳米结构形成的控制参数。线性,圆形和首次椭圆偏振光的实验表明,激光偏振对波纹的方向有很大的影响。对椭圆偏振激光束的研究表明,虽然波纹方向是由偏振椭圆的主轴定义的,但是波纹形态对椭圆率很敏感。对于硅样品,用扫描探针显微镜在烧蚀区域进行电测量可揭示表面电势的空间变化,这可能是由于掺杂剂密度的局部变化而产生的,与图案在坑底的调制有关。

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