机译:用激光诱导刻蚀技术制造的微槽的侧壁粗糙度的研究
School of Information and Mechatronics, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Cwangju 500-712, Republic of Korea;
School of Information and Mechatronics, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Cwangju 500-712, Republic of Korea;
School of Information and Mechatronics, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Cwangju 500-712, Republic of Korea;
School of Information and Mechatronics, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Cwangju 500-712, Republic of Korea;
School of Information and Mechatronics, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Cwangju 500-712, Republic of Korea;
laser micromachining; laser-induced etching; laser heating; microgroove; sidewall roughness;
机译:利用基于光纤的新型激光诱导刻蚀技术制造铜微槽
机译:等离子刻蚀步骤对异质集成方案中鳍式FET沟道侧壁粗糙度的影响研究
机译:基于光纤的激光诱导刻蚀技术在铜微槽制造工艺中的应用
机译:通过使用离子束蚀刻技术平滑侧壁粗糙度来抑制FinFET的可变性
机译:硅/硅锗化物异质结构的各向异性碳氟化合物等离子体刻蚀和等离子体刻蚀引起的侧壁损伤
机译:数据挖掘技术通过熔融沉积建模(FDM)预测聚乳酸(PLA)中印刷零件的表面粗糙度:在眼镜框制造中的实际应用
机译:等离子体蚀刻过程中侧壁线边缘粗糙度转移的起源,演变和控制