Influence of TaCls partial pressure on texture structure of TaC coating deposited by chemical vapor deposition

摘要

TaC was deposited on graphite substrate with different TaCl_5 partial pressure at 800℃ and 1200℃ by chemical vapor deposition. Microstructures and texture structures of the prepared coatings were researched with X-ray diffraction and scanning electronic microscopy. When the coating deposition process is controlled by surface reaction kinetics (800℃), TaCl_5 partial pressure had little influence on the microstructure and texture structure of the coating. When the coating formation process is controlled by diffusion kinetics (1200℃), the microstructure, texture structure of the prepared TaC grains vary greatly with TaCl_5 partial pressure. In the diffusion controlled process, the increasing of TaCl_5 partial pressure will result in the changing of gas supersaturation, and then the occurrence of secondary nucleation, which is the main reason for the changing of coating morphology and texture structure. With the help of competitive growth in (1 00) and (111) directions, the formation mechanism of the different texture coatings are discussed in detail. In addition, a diffusion model of deposition species around step-edge-corner was also proposed to explain the growth mechanism of the texture coatings.