机译:快速热退火退火的富硅SiC薄膜中面心立方纳米硅晶体形成的热力学
Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, PR China;
Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, PR China;
Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, PR China;
Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, PR China;
Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, PR China;
Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, PR China,National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, PR China;
silicon nanocrystal; face-centered cubic; thermodynamics; SiC matrix;
机译:快速热退火富硅氮化硅膜中PECVD生长的硅纳米级夹杂物的介电功能
机译:通过等离子体增强化学气相沉积制备的退火富硅氧化硅膜中的硅纳米晶形成
机译:通过反应磁控溅射沉积和快速热退火制备的富含含硅氧化硅膜的电子发射性能
机译:富含硅氧化硅薄膜的硅纳米晶体形成
机译:基于铜-铟-镓-二硒化物的薄膜太阳能电池的脉冲激光退火和快速热退火。
机译:碳化硅基体中硅纳米晶的快速热退火和结晶机理研究
机译:通过反应磁控溅射沉积和快速热退火制备的富含含硅氧化硅膜的电子发射性能