机译:使用原子精度掩埋供体结构确定扫描微波阻抗显微镜的分辨率
Sandia Natl Labs, POB 5800, Albuquerque, NM 87185 USA;
Sandia Natl Labs, POB 5800, Albuquerque, NM 87185 USA;
Sandia Natl Labs, POB 5800, Albuquerque, NM 87185 USA;
Sandia Natl Labs, POB 5800, Albuquerque, NM 87185 USA;
Sandia Natl Labs, POB 5800, Albuquerque, NM 87185 USA;
Sandia Natl Labs, Ctr Integrated Nanotechnol, POB 5800, Albuquerque, NM 87185 USA;
Sandia Natl Labs, POB 5800, Albuquerque, NM 87185 USA;
Sandia Natl Labs, POB 5800, Albuquerque, NM 87185 USA;
Sandia Natl Labs, POB 5800, Albuquerque, NM 87185 USA;
Scanning probe microscopy; Scanning tunneling microscopy; Microwave impedance microscopy; Silicon; Surface; Hydrogen resist lithography; Atomically precise fabrication;
机译:埋藏式原子精密施主器件的扫描电容显微镜配准
机译:超高分辨率扫描微波阻抗莫尔格子和上层建筑的微波阻抗显微镜
机译:纳米级掩埋CMOS互连线的扫描微波显微镜
机译:纳米级电容和电容 - 电压曲线,用于使用扫描微波阻抗显微镜(SMIM)的Si和GaN结构的电气性能的高级表征
机译:高分辨率显微电阻抗成像方法:扫描阻抗成像。
机译:超高分辨率扫描微波阻抗莫尔格子和上层建筑的微波阻抗显微镜
机译:使用原子精密埋入供体结构确定扫描微波阻抗显微镜的分辨率