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机译:用于高质量主光栅的纳米压印模板的简单且低成本的纳米加工工艺:摩擦诱导的选择性蚀刻
Southwest Jiaotong Univ, Tribol Res Inst, State Key Lab Tract Power, Chengdu 610031, Sichuan, Peoples R China;
Southwest Jiaotong Univ, Tribol Res Inst, State Key Lab Tract Power, Chengdu 610031, Sichuan, Peoples R China;
Southwest Jiaotong Univ, Tribol Res Inst, State Key Lab Tract Power, Chengdu 610031, Sichuan, Peoples R China;
Southwest Jiaotong Univ, Tribol Res Inst, State Key Lab Tract Power, Chengdu 610031, Sichuan, Peoples R China;
Southwest Jiaotong Univ, Tribol Res Inst, State Key Lab Tract Power, Chengdu 610031, Sichuan, Peoples R China;
Nanofabrication; Friction-induced selective etching; Nanoimprint template; Master grating;
机译:摩擦诱导选择性刻蚀在硅上进行温度相关的纳米加工
机译:摩擦诱导选择性刻蚀在石英上进行无掩模低破坏性纳米加工
机译:通过UV辅助选择性蚀刻在没有模板的GaAs上通过UV辅助选择性蚀刻快速纳米制剂
机译:用于纳米压印光刻的金刚石碳模板的纳米制剂
机译:纳米压印光刻的过程开发,用于硅III-V材料的选择性面积生长
机译:摩擦诱导选择性刻蚀在硅上进行温度相关的纳米加工
机译:摩擦诱导选择性刻蚀在硅上进行温度相关的纳米加工
机译:燃烧化学气相沉积工艺沉积低成本,高质量,高温超导带的研究进展