高质量、低成本的压印模板的获得是采用纳米压印技术制作分布反馈光栅的难点,本文采用双层金属掩模及liftoff金属剥离方法制作了适用于紫外压印技术的石英基压印模板.首先,采用电子柬光刻技术在镀钛的石英基片表面直写出DFB光栅的光刻胶图形,接着,在其表面溅射一层金属镍并进行金属剥离得到与光刻胶相对的图形,最后采用电感耦合等离子体(ICP)干法刻蚀技术将光栅图形转移到石英基片上,并对模板的表面进行了防粘连处理.所制作的DFB光栅压印模板周期为200 nm,光栅中间具有λ/4相移结构,适用于1 310 nm波长的相移型DFB半导体激光器光栅的制作.%It is difficult to obtain a nanoimprint stamp with low cost and high quality in fabrication of Distributed Feedback(DFB)gratings. In this paper, the quartz stamp for semiconductor DFB gratings was fabricated by using double-layer metal mask and lift-off lithography. Firstly, the photoresist pattern of a DFB grating was written on a Ti coated quartz substrate by electron beam lithography, then a layer of metal Ni was sputtered on it to obtain a corresponding pattern by metal lift-off technology. Finally, the Inductively Coupled Plasma (ICP) dry etching was used to transfer the pattern on the quartz substrate. The scanning electron microscope image of the fabricated stamp shows good uniformity with sufficiently low line edge roughness. The stamp is suitable to fabricate DFB grating for 1 310 nm semiconductor laser diodes using UV nanoimprint lithography.
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