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Fabricating high-quality ultra-thin croconic acid film using electric field guidance

机译:电场引导法制备高质量的超薄月桂酸薄膜

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摘要

A novel method for fabricating ultra-thin croconic acid (CA) films with a very low surface roughness on Si wafers is reported. With a thickness of approximately 20 nm and surface roughness of +/- 2.0 nm, the film obtained far exceeds the quality and smoothness of previously reported CA thin films. The film is prepared by applying a high electric field in situ during thermal vapor deposition, promoting alignment of the CA molecules due to their high dipole moment. The result is compared with that of the best-reported film produced via a combination of thermal evaporation at low substrate temperature with subsequent slow heating, to demonstrate the greatly enhanced uniformness of the film. In addition, the film's ferroelectric behavior is demonstrated using piezoresponse force microscopy measurements. A mechanism for film formation under electric field assisted deposition is proposed. (C) 2017 Elsevier B.V. All rights reserved.
机译:报道了一种在硅晶片上制造具有非常低的表面粗糙度的超薄croconic酸(CA)膜的新方法。具有约20nm的厚度和+/- 2.0nm的表面粗糙度,所获得的膜远远超过先前报道的CA薄膜的质量和光滑度。该膜是通过在热气相沉积过程中在原位施加高电场来制备的,该膜由于其高偶极矩而促进了CA分子的排列。将结果与通过在低基材温度下热蒸发和随后的缓慢加热相结合生产的最佳报告薄膜的结果进行比较,以证明薄膜的均匀性大大提高。此外,膜的铁电行为通过压电响应力显微镜测量得到证明。提出了在电场辅助沉积下成膜的机理。 (C)2017 Elsevier B.V.保留所有权利。

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