MOCVD techniques for the production of coated conductors

摘要

New deposition techniques are used for MOCVD of YBCO-, buffer- and protective layers in a reel to reel system. This system consists of three tape reactors and evaporators. So it is possible to deposit the superconductor, the buffer layer and a protective layer in situ in one vacuum system. The operativeness of the reactors were tested separately. In the YBCO reactor superconducting films have been deposited with critical current densities over 1 MA/cm/sup 2/ at 77 K on moved textured Nickel tapes at a transport velocity of 4 m/h. Textured Ni substrates were coated in the buffer layer reactor with CeO/sub 2/ and in first experiments a Ag layer was deposited by MOCVD onto the YBCO film.