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In-plane dielectric characterization of sol-gel derived PLZT (9/65/35) thin films using an interdigital electrode configuration

机译:使用叉指电极配置对溶胶-凝胶衍生的PLZT(9/65/35)薄膜进行面内介电表征

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摘要

Lead lanthanum zirconate titanate (PLZT 9/65/35) thin films were deposited on MgO (00l) substrates using a sol-gel method. X-ray diffraction measurements reveal that the PLZT film has epitaxially grown on the substrate and has a pure perovskite structure. Using gold interdigital electrodes the in-plane dielectric properties of the films were measured as a function of frequency (1 kHz to 10 GHz), temperature (293-435 K) and dc electric field (0-20 MV/m). The PLZT (9/65/35) thin film exhibits a diffuse phase transition, which indicates a relaxor-like ferroelectric behavior. The temperature dependence of the characteristic relaxation time was analyzed in terms of the Voegel-Fulcher relation. The relative permittivity has a high tunability of 34%-42% in the frequency range of 10 MHz to 1 GHz.
机译:用溶胶-凝胶法将锆钛酸铅钛酸铅(PLZT 9/65/35)薄膜沉积在MgO(00l)衬底上。 X射线衍射测量表明PLZT膜已经在衬底上外延生长并且具有纯钙钛矿结构。使用金叉指电极,根据频率(1 kHz至10 GHz),温度(293-435 K)和直流电场(0-20 MV / m)测量薄膜的平面介电性能。 PLZT(9/65/35)薄膜表现出扩散相变,这表明它具有类似弛豫的铁电行为。根据Voegel-Fulcher关系分析了特征驰豫时间的温度依赖性。相对介电常数在10 MHz至1 GHz的频率范围内具有34%-42%的高可调性。

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