Growth processes of lithium titanate thin films deposited by using pulsed laser deposition

摘要

We have investigated the pulsed laser deposition (PLD) growth processes of spinel lithium titanates based on the preparation of Li4Ti5O12 and LiTi2O4 from a Li4Ti5O12 target. The Li/Ti atomic ratio of the species arriving at substrate during the deposition was only ∼0.5. The LiTi2O4 epitaxial thin films fabricated on MgAl2O4 (111) substrate exhibited high conductivity at room temperature (∼3.0 × 103 Ω-1 cm-1) and a superconducting transition temperature of ∼12 K. These values are the highest reported for epitaxial thin films. Our results demonstrate the importance of the target composition, providing further insights into the Li-containing metal oxide deposition processes using PLD.