Fabrication of large area two- and three-dimensional polymer photonic crystals using single refracting prism holographic lithography

摘要

We demonstrate an approach for easy fabrication of two-dimensional (2D) hexagonal and three-dimensional (3D) face-centered-cubic (fcc)-type photonic crystal (PhC) microstructures in a photosensitive polymer by applying a simple single refracting prism. This prism enables the splitting and recombining of a single incoming laser beam to form multiple-beam interference pattern simultaneously. Thus, antivibration equipment and complicated optical alignment system are not . required, leading to a much more simple optical setup than previously reported laser holographic lithography techniques. Large-scale (over 1 cm~2) 2D hexagonal and 3D fee-type PhCs have been produced. Reflection/transmission measurements performed on the fabricated 3D fee-type PhC structures agree well with the corresponding band structure calculation.