Determination by x-ray reflectivity and small angle x-ray scattering of the porous properties of mesoporous silica thin films

摘要

Two-dimensional hexagonal silica thin films templated by a triblock copolymer were investigated by grazing incident small angle x-ray scattering (GISAXS) and x-ray reflectivity (XR) before and after removing the surfactant from the silica matrix. XR curves—analyzed above and below the critical angle of the substrate—are evaluated by the matrix technique to obtain the average electron density of the films, the wall thickness, the electron density of the walls, the radius of the pores, and subsequently the porosity of such mesoporous films. In combination with GISAXS, the surface area of the mesopores is ascertained, thereby providing a complete analysis of the porosity in thin films by x-ray scattering methods.