320 x 256 solar-blind focal plane arrays based on Al_xGa_(1-x)N

摘要

We report AlGaN-based backilluminated solar-blind ultraviolet focal plane arrays operating at a wavelength of 280 nm. The electrical characteristics of the individual pixels are discussed, and the uniformity of the array is presented. The p-i-n photodiode array was hybridized to a 320 x 256 read-out integrated circuit entirely within our university research lab, and a working 320 x 256 camera was demonstrated. Several example solar-blind images from the camera are also provided.