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Lasing in GaN microdisks pivoted on Si

机译:在以Si为中心的GaN微盘中发射激光

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摘要

Arrays of pivoted GaN microdisks have been fabricated on a GaN/Si material by a combination of dry and wet etching. The Si material beneath the GaN microdisks is removed by wet etching, leaving behind a fine pillar to support the disks. Raman spectroscopy reveals substantial strain relaxation in these structures. Resonant modes, corresponding to whispering gallery modes, are observed in the photoluminescence spectra. Stimulated emission is achieved at higher optical pumping intensities.
机译:通过结合干法刻蚀和湿法刻蚀,在GaN / Si材料上制造了枢轴GaN微盘阵列。 GaN微盘下方的Si材料通过湿蚀刻去除,留下细小的支柱来支撑磁盘。拉曼光谱显示这些结构中的应变明显松弛。在光致发光光谱中观察到与耳语画廊模式相对应的共振模式。在较高的光泵浦强度下实现了受激发射。

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