Realization of periodic and quasiperiodic microstructures with sub-diffraction-limit feature sizes by far-field holographic lithography

摘要

The authors experimentally demonstrate a far-field holography for the realization of Ag nanoparticles-embedded periodic and quasiperiodic microstructures with feature sizes beyond the diffraction limit. Periodic cylindrical nanoshell arrays with about 240 nm hole diameter and 12-fold symmetry quasiperiodic structures with 220 nm feature sizes are achieved, respectively, by using a 632.8 nm laser beam. Our results imply that conventional far-field optical technology is capable of fabricating nanostructures in modern mieromanufacture.