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Fabrication and dynamic tuning of periodic structures from holographic lithography.

机译:全息光刻技术对周期结构的制作和动态调整。

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摘要

In this dissertation, I fabricated one-dimensional (1D), two-dimensional (2D) and three-dimensional (3D) periodic structures through holographic lithography (HL) and backfilling conversion with different materials. Along the line, I investigated their intrinsic structure-property relationship, harness and utilize the mechanical instability, and explored novel applications as tunable periodic structures.;In order to mimic butterfly wings which show both structural color and superhydrophobicity, 3D diamond photonic crystals with controllable nano-roughness (≤ 120 nm) were fabricated from epoxy-functionalized cyclohexyl polyhedral oligomeric silsesquioxanes (epoxy-POSS). The nano-roughness was generated due to microphase separation of the polymer chain segments in nonsolvents during rinsing, which could be tuned by crosslinking density of the polymer and choice of solvents. Such structure offers opportunities to realize superhydrophobicity, enhanced dye adsorption in addition to the photon management in the 3D photonic crystal.;Most of current studies on tunable periodic structures show limited tunable optical property ranges, which is attractive to be expanded. 2D shape memory polymer (SMP) membranes consisting of a hexagonal array of micron-sized holes were fabricated by converting from epoxy-POSS template. Reversible color switching from transparency to colorful state was achieved through thermal-mechanical deformation, utilizing shape memory effect and mechanical instability induced pattern transformation. Continuum mechanical analyses corroborated well with experimental observations. Potential applications as displays were demonstrated via two different approaches.;It is challenging to directly fabricate high aspect-ratio (AR) 1D nano-scale structures, due to depth-of-focus (DOF) limitation, pattern collapse from capillary force and distortion during solvent swelling. With HL and supercritical drying, high AR 1D nano-scale structures were fabricated with epoxy-POSS and SU-8, which avoid DOF limitation and pattern collapse. Due to enhanced thermal and mechanical stability of epoxy-POSS, 1D nanogratings (AR up to 10) with controllable periodicity, filling fraction and surface roughness, were achieved, which could be directly converted to silica-like through calcination. By exploiting swelling-induced buckling of 1D SU-8 nanowalls with nanofibers formed in-between, long-range ordered 2D nanowaves with weaker reflecting color were achieved, where degree of lateral undulation could be controlled by tuning AR and exposure dosage. Using double-exposure through photomasks, patterns with both nanowaves and nanowalls for optical display were created.
机译:本文通过全息光刻(HL)并用不同的材料进行回填转换,制造出一维(1D),二维(2D)和三维(3D)周期性结构。沿着这条线,我研究了它们的内在结构-性质关系,利用并利用了机械不稳定性,并探索了可调谐周期结构的新应用。;为了模仿既显示结构颜色又具有超疏水性的​​蝴蝶翅膀,可控的3D金刚石光子晶体纳米粗糙度(≤120 nm)由环氧官能化的环己基多面体低聚倍半硅氧烷(epoxy-POSS)制成。纳米粗糙度是由于漂洗过程中非溶剂中聚合物链段的微相分离而产生的,这可以通过聚合物的交联密度和溶剂的选择来调节。除了在3D光子晶体中进行光子管理外,这种结构还提供了实现超疏水性,增强染料吸附的机会。;当前对可调周期结构的大多数研究表明可调光学特性范围有限,因此具有扩展吸引力。通过从环氧-POSS模板转换制得由微米级孔的六边形阵列组成的2D形状记忆聚合物(SMP)膜。利用形状记忆效应和机械不稳定性引起的图案转换,通过热机械变形实现了从透明状态到彩色状态的可逆颜色切换。连续体力学分析与实验观察得到了很好的证实。通过两种不同的方法展示了显示器的潜在应用。由于聚焦深度(DOF)限制,毛细作用力导致的图案塌陷和变形,直接制造高长宽比(AR)的一维纳米尺度结构具有挑战性在溶剂溶胀期间。通过HL和超临界干燥,用环氧-POSS和SU-8制备了高AR 1D纳米级结构,避免了自由度限制和图案塌陷。由于提高了环氧POSS的热稳定性和机械稳定性,因此获得了具有可控制的周期性,填充率和表面粗糙度的一维纳米光栅(AR高达10),可以通过煅烧将其直接转化为二氧化硅。通过利用膨胀诱导的一维SU-8纳米壁之间形成的纳米纤维的屈曲,获得了具有较弱反射色的远距离有序二维二维纳米波,其中可以通过调整AR和曝光剂量来控制横向起伏的程度。使用通过光掩模的两次曝光,创建了具有用于光学显示的纳米波和纳米壁的图案。

著录项

  • 作者

    Li, Jie.;

  • 作者单位

    University of Pennsylvania.;

  • 授予单位 University of Pennsylvania.;
  • 学科 Engineering Materials Science.
  • 学位 Ph.D.
  • 年度 2013
  • 页码 128 p.
  • 总页数 128
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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