High intermodulation gain in a micromechanical Duffing resonator

摘要

In this work we use a micromechanical resonator to experimentally study small signal amplification near the onset of Duffing bistability. The device consists of a PdAu beam serving as a micromechanical resonator excited by an adjacent gate electrode. A large pump signal drives the resonator near the onset of bistability, enabling amplification of small signals in a narrow bandwidth. To first order, the amplification is inversely proportional to the frequency difference between the pump and the signal. We estimate the gain to be about 15 dB for our device.