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Micromechanical resonator and method for trimming micromechanical resonator
Micromechanical resonator and method for trimming micromechanical resonator
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机译:微机械谐振器及其修剪微机械谐振器的方法
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摘要
The present disclosure describes micromechanical resonator, a resonator element for the resonator, and a method for trimming the resonator. The resonator comprises a resonator element having a length, a width, and a thickness, where the length and the width define a plane of the resonator element. The resonator element comprises at least two regions (52, 53) in the plane of the resonator element, wherein the at least two regions have different thicknesses.
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