Micromechanical resonator and trimming method of micromechanical resonator

摘要

This disclosure describes a micromechanical resonator, a resonator element for the resonator, and a method for trimming the resonator. The resonator includes a resonator element having a predetermined length, width, and thickness, and the length and width define a plane of the resonator element. The resonator element has at least two regions (52, 53) in the plane of the resonator element, the at least two regions having different thicknesses.