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首页> 外文期刊>Applied Physics Letters >Electret mechanism, hysteresis, and ambient performance of sol-gel silica gate dielectrics in pentacene field-effect transistors
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Electret mechanism, hysteresis, and ambient performance of sol-gel silica gate dielectrics in pentacene field-effect transistors

机译:并五苯场效应晶体管中的溶胶-凝胶二氧化硅栅电介质的驻极体机理,磁滞和环境性能

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摘要

The electret induced hysteresis was studied in sol-gel silica films that result in higher drain currents and improved device performance in pentacene field-effect transistors. Vacuum and ambient condition studies of the hysteresis behavior and capacitance-voltage characteristics on single layer and varying thicknesses of bilayer dielectrics confirmed that blocking layers of thermal oxide could effectively eliminate the electret induced hysteresis, and that thin (25 nm) sol-gel silica dielectrics enabled elimination of nanopores thus realizing stable device characteristics under ambient conditions.
机译:在溶胶-凝胶二氧化硅薄膜中研究了驻极体引起的磁滞现象,该薄膜可导致并五苯场效应晶体管具有更高的漏极电流并改善了器件性能。对单层磁滞行为和电容-电压特性以及不同厚度的双层电介质的真空和环境条件研究证实,热氧化物的阻挡层可以有效消除驻极体引起的磁滞,并且薄的(25 nm)溶胶-凝胶二氧化硅电介质能够消除纳米孔,从而在环境条件下实现稳定的器件特性。

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