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Organic-based distributed feedback lasers by direct electron-beam lithography on conjugated polymers

机译:直接电子束光刻在共轭聚合物上的有机基分布式反馈激光器

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摘要

The authors demonstrate direct electron-beam writing on conjugated polymers as patterning route to realize plastic optoelectronic devices. Lithography was carried out by a 20 kV electron beam dose in the range of 0-360 μC/cm~2, with no need for masking or development/etching processes. The features could be employed for the fabrication of polymer distributed feedback lasers, exhibiting optically pumped lasing in the range of 607-620 nm, with a spectral line width around 1 nm and a threshold excitation fluence of 34 μJ/cm~2.
机译:作者展示了在共轭聚合物上直接进行电子束书写,作为实现塑料光电器件的构图途径。用20 kV电子束剂量在0-360μC/ cm〜2范围内进行光刻,无需掩膜或显影/蚀刻工艺。该特征可用于制造聚合物分布反馈激光器,其表现出在607-620 nm范围内的光泵浦激光,光谱线宽约为1 nm,阈值激发通量为34μJ/ cm〜2。

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