DISTRIBUTION FEEDBACK TYPE LASER DIODE IN WHICH AN OPTICAL MODE SIZE CONVERTOR, WITH AN ATTACHED SPOT SIZE CONVERTOR (SSC) IN RIDGE WAVE GUIDE (RWG) TYPE DISTRIBUTED FEEDBACK-LASER DIODE (DFB-LD) OUTPUT TERMINAL WHICH PERFORMS SUPER HIGH SPEED DIRECT MODULATION, IS MONOLITHICALLY INTEGRATED AND A PRODUCTION METHOD

摘要

PURPOSE: A distribution feedback type laser diode in which an optical mode size convertor is monolithically intergrated and a production method are provided to increase coupling efficiency with an optical fiber by integrating SSC.;CONSTITUTION: Number of layers is grown and the layers are composed of a substrate (1), InGaAsP grid layer (2), n-lnP space layer (3), an activated layer (4), P-lnP upper clad layer (5), an etching stoppage layer (6), and p-lnP cap layer (7). Part of the activated layer is etched and a butt layer is created. A tapered area is formed on the butt layer. Manual ridge wave guide layer is etched in a deep ride wave guide shape under the tapered area. A P clad layer (12) and an ohmic layer (13) are grown consecutively on a structure. The deep ridge wave guide buried in the tapered area is formed on the ohmic layer. Polyimide or polymer benzocyclobutene (BCB) is formed on an outer area of the deep ridge waveguide.;COPYRIGHT KIPO 2013