Insights into Ni-filament formation in unipolar-switching Ni/HfO_2/TiN resistive random access memory device

摘要

In this letter, CMOS-compatible Ni/HfO_2/TiN resistive random access memory stacks demonstrated attractive unipolar switching properties, showing >10~3 endurance and long retention at 150 ℃. The Ni bottom electrode (BE) improved the switching yield over the NiSiPt BE. To better understand the unipolar forming mechanism, ab initio simulation and time of flight-secondary ion mass spectroscopy were utilized. Compared to the NiSiPt BE, Ni BE gives larger Ni diffusion in the HfO>2 and lower formation enthalpy of Ni~(2+) species during electrical forming. Both the electrical and physical results supported a Ni-injection mechanism for the filament formation.