Comprehensive characterization of surface acoustic wave resonators using relaxor based ferroelectric single crystals

摘要

One-port surface acoustic wave resonators (SAW) were fabricated and characterized using Y-cut X propagating relaxor based ferroelectric single crystals of Pb(Mg_(1/3)Nb_(2/3))O_3-33%PbTiO_3 and Pb(In_(1/3)Nb_(2/3))O_3-Pb(Mg_(1/3)Nb_(2/3))O_3-PbTiO_3 (PIN-PMN-PT). The experimental results demonstrated ultrahigh electromechanical coupling factor K~2 of ～60% for shear horizontal SAW and a relatively strong spurious resonance due to the Rayleigh-type SAW which can be sufficiently suppressed with Au electrode of large thickness. Characteristics of temperature stability, sensitivity to DC bias voltage, and homogeneity for the two resonators were evaluated and compared. The results showed similar instability of domain structure, and PIN-PMN-PT resonators have better temperature stability, but inferior homogeneity compared to that of PMN-33%PT resonators.