Room temperature continuous wave lasing of electrically injected GaN-based vertical cavity surface emitting lasers

摘要

Continuous wave (CW) lasing of electrically injected GaN-based vertical cavity surface emitting lasers (VCSELs) was achieved at room temperature. First, a high quality factor (Q) VCSEL-structured device with very narrow linewidth of 0.12nm, corresponding to a Q-value of 3570 was obtained through two-step substrate transfer technique. However, poor heat dissipation ability prevented the device from lasing. Based on the high-Q resonant cavity design, we further fabricated vertical-structured VCSELs through metal bonding technique on Si substrate. CW lasing from vertical-structured VCSELs was observed with threshold current of density of 1.2kA/cm~2 and lasing linewidth of about 0.20 nm.