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机译:氢氮混合等离子体对4H-SiC表面的化学和电子钝化
School of Electronic Science and Technology, Faculty of Electronic Information and Electrical Engineering, Dalian University of Technology, Dalian 116024, China;
School of Electronic Science and Technology, Faculty of Electronic Information and Electrical Engineering, Dalian University of Technology, Dalian 116024, China;
School of Electronic Science and Technology, Faculty of Electronic Information and Electrical Engineering, Dalian University of Technology, Dalian 116024, China;
State Key Laboratory of Material Modification by Laser, Ion and Electron Beam (Ministry of Education), Dalian University of Technology, Dalian 116024, China;
School of Electronic Science and Technology, Faculty of Electronic Information and Electrical Engineering, Dalian University of Technology, Dalian 116024, China;
机译:发行人注:“氢-氮混合等离子体对4H-SiC表面进行化学和电子钝化” [应用物理来吧104,202101(2014)]
机译:氢氮混合等离子体对4H-SiC表面的化学和电子钝化
机译:电子回旋共振氢氮混合等离子体预处理SiC表面并结合后氧化退火钝化SiO2 / 4H-SiC界面缺陷
机译:A-SI:H的等离子体化学气相沉积,可在低温下提供C-SI表面的表面钝化
机译:在感应耦合的改性气态电子会议(mGEC)反应器中研究碳氟化合物等离子体中的气相,表面化学和等离子体-表面相互作用。
机译:微波等离子体化学气相沉积法在4H-SiC上异质外延金刚石生长
机译:砷化镓表面的化学功能化和电子钝化
机译:用被动辐射表征混合β/γ表面污染