Flexible surface acoustic wave strain sensor based on single crystalline LiNbO_3 thin film

摘要

A flexible surface acoustic wave (SAW) strain sensor in the frequency range of 162-325MHz was developed based on a single crystalline LiNbO3 thin film with dual resonance modes, namely, the Rayleigh mode and the thickness shear mode (TSM). This SAW sensor could handle a wide strain range up to +/- 3500 mu e owing to its excellent flexibility, which is nearly six times the detecting range of bulk piezoelectric substrate based SAW strain sensors. The sensor exhibited a high sensitivity of 193 Hz/mu e with a maximum hysteresis less than 1.5%. The temperature coefficients of frequency, for Rayleigh and TSM modes, were -85 and -59 ppm/degrees C, respectively. No visible deterioration was observed after cyclic bending for hundreds of times, showing its desirable stability and reliability. By utilizing the dual modes, the strain sensor with a self-temperature calibrated capability can be achieved. The results demonstrate that the sensor is an excellent candidate for strain sensing. Published by AIP Publishing.