Optical and electrical properties of the transparent conductor SrVO_3 without long-range crystalline order

摘要

It has been shown recently that the perovskite oxide SrVO_3 is a transparent conductor with optical and electrical properties outreaching those of the most used material indium tin oxide (ITO). These properties, observed in the crystalline phase, imply the strong potential of SrVO_3 for use as a lower cost alternative to ITO, but the possible integration of this perovskite oxide material in actual electronic devices is still an open question. One of the possible approaches for the integration of oxide materials is the use of amorphous thin films, allowing low thermal budgets to preserve the performances of the electronic device. Therefore, in this study, the electrical and optical properties of amorphous or poorly crystallized thin SrVO_3 films are investigated.