Microstructural analysis of an epitaxial AlN thick film/trench-patterned template by three-dimensional reciprocal lattice space mapping technique

摘要

Three-dimensional (3D) lattice plane microstructures were investigated at local regions in an epitaxial AlN thick film grown on a trench-patterned AlN/sapphire template. A 3D reciprocal lattice space mapping technique combined with cross-sectional X-ray microdiffraction using an appropriate Bragg reflection quantitatively revealed the inhomogeneity of the lattice structures in the AlN film without loss of spatial resolution. The results showed a strong correlation of the lattice plane tilt/twist and variations with respect to the void configuration, the patterning structure of the template, and the dislocation morphologies confirmed by transmission electron microscopy. (C) 2016 The Japan Society of Applied Physics