Behavior of absolute densities of atomic oxygen in the gas phase near an object surface in an AC-excited atmospheric pressure He plasma jet

摘要

The quantitative behavior of atomic oxygen in the gas phase near a Cu wire surface in an AC-excited atmospheric pressure He plasma jet in open air was measured using time-resolved vacuum ultraviolet absorption spectroscopy. The atomic oxygen density had a peak at a distance between the plasma source and the Cu wire, and the peak position moved away from the source with an increase in the gas flow rate. The behavior is considered to be dependent on the plasma density and the influence of ambient air. The results are important for supplying atomic oxygen to samples for plasma jet treatment in the atmosphere. (C) 2017 The Japan Society of Applied Physics